Scanning mechanism for high-speed high-resolution scanning
US7037012B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2003 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | Jun 23, 2023 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.