Sensor device for performing rapid optical measurement of distances according to the confocal optical imaging principle
US7038793B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 15, 2002 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | Oct 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor device is for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device includes a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element. The components of the sensor device are arranged in such a manner that: light emitted by the light-emitting element is reflected by the reflector; while the reflector is displaced, the imaging optics focus the light reflected by the reflector at least once onto the surface to be measured; the focussed light is at least partially backscattered by the surface to the measured, and; while the reflector is displaced, the imaging optics focus, via the reflector, the backscattered light at least once onto the light-receiving element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.