Micro-oscillation element
US7038830B2 · kind B2 · utility
4Cited by
3References
18Claims
0Family size
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Key dates
| Filing date | Aug 26, 2004 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | Oct 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.