Fabrication of optical waveguides for reduction of minimum waveguide spacing
US7039288B2 · kind B2 · utility
5Cited by
11References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2001 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/122
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fabrication method reduces minimum waveguide spacing in an integrated optical device. Core regions of the waveguides are etched into cladding material and then filled with core material, instead of etching the spacing between the core material first and then filling the spacing. This allows the spacing between the core regions to be made arbitrarily small, without being constrained by an aspect ratio associated with a conventional etch and deposition/re-flow process used to form waveguide spacings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.