Robotic storage buffer system for substrate carrier pods
US7039499B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2003 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | May 4, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor. The robot can alternatively be mounted directly to the storage system enclosure structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.