Vacuum suction device and driving method thereof
US7040679B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2003 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | May 27, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
In a suction device, a suction head is alternately connected to a negative pressure source and a positive pressure source by means of a switching valve, a light-weight workpiece is sucked by and released from the suction head. When the suction head and the positive pressure source are connected to each other by means of the switching valve to release the workpiece, a releasing pressure is instantaneously supplied to the suction head. The magnitude of the releasing pressure is set to a value equal to or less than the atmospheric pressure and set to a value which is necessary for the workpiece to drop by its own weight from the suction head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.