Thin-film solar cells and method of making

US7041342B2 · kind B2 · utility

Assignee

• Schott Glas · DE

Inventors

• Manfred Lohmeyer · Nackenheim, DE
• Stefan Bauer · Alzey, DE
• Burkhard Danielzik · Ingelheim am Rhein, DE
• Wolfgang Mohl · Worms, DE
• Nina Freitag · Wallertheim, DE

Key dates

• Filing date: Oct 10, 2003
• Grant date: May 9, 2006
• Expiry date: Oct 10, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.