Patent · US Expired

Method for the manufacture of micro structures

US7041436B2 · kind B2 · utility

4Cited by

4References

4Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Rainer Krause · Hochheim, DE
Markus Schmidt · Seibersbach, DE

Key dates

Filing date	Dec 12, 2003
Grant date	May 9, 2006
Priority date	—
Expiry date	Dec 12, 2023

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB82Y40/00
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Method for the Manufacture of Micro Structures A method for the manufacture of micro structures in substrates is provided. The method uses a combination of photolithographic mask technology and micro contact printing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.