Magnetic field detecting element and method for manufacturing the same
US7041526B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2004 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | Feb 23, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F17/0006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for manufacturing a magnetic field detecting element having a soft magnetic core formed on a substrate, first and second coils, each having coil lines, arranged above and below the core, the method including forming a seed film on the substrate, removing a portion of the seed film using a predetermined pattern so that coil lines constituting the first coil subsequently formed on the seed film are separated, forming a first plating mold having grooves corresponding to the predetermined pattern on an upper portion of the seed film, forming coil lines constituting the first coil by filling the grooves of the first plating mold with metal, forming the soft magnetic core and the second coil on an upper portion of the substrate and on the seed film where the first coil is formed, and cutting off edges of the substrate so that the separated coil lines are insulated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.