Replaceable anode liner for ion source
US7041984B2 · kind B2 · utility
6Cited by
3References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 2004 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | May 20, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.