Two-dimensional stepwise-controlled microstructure
US7042609B2 · kind B2 · utility
7Cited by
15References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 6, 2004 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | Dec 6, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.