Bouncing mode operated scanning micro-mirror
US7042613B2 · kind B2 · utility
5Cited by
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42Claims
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Key dates
| Filing date | Aug 2, 2004 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | Sep 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis, and a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. The bouncing mechanism includes an element chosen to impart an overall nonlinear stiffness to the system and is selected from the group of elements consisting of a bouncer and a pre-curved nonlinear stiffness element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.