Patent · US Expired

Method for examining foreign matters in through holes

US7043072B2 · kind B2 · utility

15Cited by
5References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 29, 2001
Grant dateMay 9, 2006
Priority date—
Expiry dateMar 25, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/95653
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided herein are a method and an apparatus for examining foreign matters in through holes, which can quickly conduct an examination of foreign matter in through holes with low costs and high accuracy. Light passing through a plurality of through holes having a uniform size is simultaneously taken as image data, the number of areas of the imaged masses corresponding to the plurality of the respective through holes is initially counted, and a process to determine presence or absence of foreign matters is conducted by mutually comparing areas of adjacent masses for only a work piece with a counted value of the masses being concurred with a specified value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.