Patent · US Expired

Nonvolatile semiconductor memory device comprising a variable resistive element containing a perovskite-type crystal structure

US7045840B2 · kind B2 · utility

49Cited by
3References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 1, 2004
Grant dateMay 16, 2006
Priority date
Expiry dateDec 1, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B63/30
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

In a nonvolatile semiconductor memory device including a variable resistive element formed by sequentially stacking a lower electrode, a variable resistor with a perovskite-type crystal structure, and an upper electrode, at least one of the lower electrode and the upper electrode is a particulate electrode configured to include a particulate conductor aggregate so that the contact area with the variable resistor at an interface is effectively reduced to realize high initial resistance of the variable resistive element. Further, a film of the variable resistor is preferably formed so as to be in a highly crystalline state.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.