Non-volatile semiconductor memory
US7045854B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2003 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Nov 4, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/037
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An object of the present invention is to provide a semiconductor memory device suitable for larger-capacity storage because of its ability to store 3 or more bits in one element and capable of a high-speed and high-efficiency write operation due to a reduced leakage current during the write operation and provide a fabrication method therefor. According to the present invention, each of elements has a source region, a drain region, a control gate, two charge storage regions, and one or more assist gates. During a write operation, source side injection writing is performed with respect to a write target element by using the assist gates, while adjacent elements are isolated by field isolation using the assist gates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.