Magnetic sensor with variable sensitivity
US7046002B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 26, 2004 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Nov 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) device comprising a base structure; a magnetic sensor attached to the base structure and operable for sensing a magnetic field and allowing for a continuous variation of an amplification of the magnetic field at a position at the magnetic sensor; and for receiving a DC voltage and an AC modulation voltage in the MEMS device; a pair of flux concentrators attached to the magnetic sensor; and a pair of electrostatic comb drives, each coupled to a respective flux concentrator such that when the pair of electrostatic comb drives are excited by a modulating electrical signal, each flux concentrator oscillates linearly at a prescribed frequency; and a pair of bias members (mechanical spring connectors) connecting the flux concentrators to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.