Micro-mirrors with flexure springs
US7046415B2 · kind B2 · utility
6Cited by
6References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2003 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Dec 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.