Patent · US Expired

Micro-mirrors with flexure springs

US7046415B2 · kind B2 · utility

6Cited by
6References
40Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 21, 2003
Grant dateMay 16, 2006
Priority date
Expiry dateDec 24, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/0841
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.