MEM micro-structures and methods of making the same
US7046420B1 · kind B1 · utility
6Cited by
36References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2003 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Feb 28, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons for modulating an incident light source. An optical MEM system in accordance with the invention includes a light source and suitable optics for transmitting light to and from the array of free metal ribbons. The optical MEM device exhibits reduced surface charging and has applications in optical communications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.