Reflection-type light modulating array element and exposure apparatus
US7046422B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2004 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Oct 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflection-type light modulating array element has: a substrate; a movable member provided with a beam body provided on the substrate through a first gap, a light reflector capable of rotational displacement by twisting of the beam body, and an electrically conducting part formed at least in a partial portion of the movable member; a lower electrode provided on a substrate side to face the movable member through the first gap, and an upper electrode provided on a side opposite to the lower electrode to face the movable member through a second gap, and thereby the movable member is between the lower electrode and the upper electrode, wherein a voltage is applied to the upper electrode, the lower electrode and the electrically conducting part to cause an rocking displacement of the light reflector and thereby deflect a reflection direction of a light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.