High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices
US7047097B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 9, 2002 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Feb 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41152
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Devices being controlled electronically via physical manipulation often display a resonance. In many circumstances, the frequency range of operation is not close to the resonance frequency. In these cases, the resonance can be removed through the use of simple compensation techniques such as filters. However, when the resonance frequency is close to the frequency range of operation and when the resonance frequency can change depending on temperature, time, and physical position of the device, simple compensation techniques cannot be used. The present invention presents a non-mechanical technique for providing compensation for devices with a shifting resonance. The non-mechanical technique allows for the compensation to be performed via computation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.