Accelerometer
US7047808B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2004 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Feb 29, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer having a plate-like proof mass (1), flexible mounting legs (2) each co-planar with the proof mass (1), a ring-like support (3), in which the proof mass (1) is moveably mounted, with each mounting leg (2) being connected at one end to the proof mass (1) and connected at another end to the support (3) and with the mounting legs (2) extending substantially perpendicularly to the sensing direction, a plurality of interdigitated capacitor fingers mounted, in a gaseous medium, in the ring-like support (3) for sensing linear movement of, and for providing gaseous medium squeeze damping for the proof mass (1) in the sensing direction, with the fingers, proof mass (1), mounting legs (2) and support (3) being co-planar and formed from a single plate of mono-crystalline silicon, which fingers comprise fixed first, second, third and fourth arrays (5, 6, 7, 8) of laterally spaced fingers extending substantially perpendicularly to the sensing direction and away from the support (3) towards to the proof mass (1), and moveable fifth, sixth, seventh and eighth arrays (10, 11, 12, 13) of laterally spaced fingers extending substantially perpendicularly to the sensing direction from a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.