Microelectricalmechanical system with improved beam suspension
US7049806B2 · kind B2 · utility
1Cited by
13References
29Claims
0Family size
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Key dates
| Filing date | Sep 27, 2004 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Sep 27, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/051
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.