Ionization vacuum gauge
US7049823B2 · kind B2 · utility
9Cited by
8References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 3, 2004 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Sep 29, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30434
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.