Microfocus X-ray tube
US7050543B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 5, 2003 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Jan 4, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J35/116
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microfocus X-ray tube is provided, and comprises a head that during operation of the X-ray tube faces an object that is to be inspected. The head has an outer surface with a cross-section that tapers toward a free end of the head. A target is disposed on or in the head. A mechanism is provided for forming an electron beam adapted to bombard the target, and forms the electron beam such that the X-ray tube has a focus with a diameter of ≦200 μm. The target has an outer surface with a cross-section that tapers toward an end of the target that during the operation of the X-ray tube faces an object that is to be inspected. A collimator can be provided for the target and also has an outer surface with a cross-section that tapers toward an end of the collimator that during operation of the X-ray tube faces an object that is to be inspected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.