Monolithic multi-functional integrated sensor and method for fabricating the same
US7051595B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2005 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Jun 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic multi-functional integrated sensor and method for making the monolithic multi-functional integrated sensor. The monolithic multi-functional integrated sensor includes: a pressure sensor including a plurality of piezoresistors having resistance values which vary with a change in external pressure, the piezoresistors being disposed in a direction so as to be subject to a piezoresistive effect produced by the external pressure at or beyond a predetermined first level; and a temperature sensor including a resistor having a resistance value which varies with a change in temperature, the resistor being disposed in a direction so as to be subject to a piezoresistive effect produced by the external pressure below a predetermined second level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.