Gas sensor device

US7053425B2 · kind B2 · utility

Assignee

• General Electric Company · US

Inventors

• Peter Micah Sandvik · Guilderland, US
• Vinayak Tilak · Clifton Park, US
• Jesse Berkley Tucker · Knightdale, US
• Stanton Earl Weaver · Broadalbin, US
• David Mulford Shaddock · Troy, US
• Jonathan Lloyd Male · Schoharie, US
• John Patrick Lemmon · Delanson, US
• Mark Allen Woodmansee · Houston, US
• Venkatesan Manivannan · Parsippany, US
• Deborah Ann Haitko · Schenectady, US

Key dates

• Filing date: Nov 12, 2003
• Grant date: May 30, 2006
• Expiry date: Nov 12, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02A50/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gas sensor device including a semiconductor substrate; one or more catalytic gate-electrodes deposited on a surface of the semiconductor substrate; one or more ohmic contacts deposited on the surface of the semiconductor substrate and a passivation layer deposited on at least a portion of the surface; wherein the semiconductor substrate includes a material selected from the group consisting of silicon carbide, diamond, Group III nitrides, alloys of Group III nitrides, zinc oxide, and any combinations thereof.