Variable capacitance element
US7054132B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Jul 7, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A variable capacitance element includes a movable element provided above a substrate using supporting portions and support beams so as to be displaced from the substrate. An insulating film and a movable electrode are provided on a conductor facing surface of the movable element. A driving electrode is arranged to displace the movable element, between a signal cutoff position and a signal passage position, whereby a high frequency signal transmitted through a transmission line is cut off or allowed to pass. The insulating film uses compressive stress to warp the movable element and the movable electrode in a direction of warping in a convex form toward the transmission line, and maintains this warping direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.