Patent · US Expired

Dielectric materials

US7057244B2 · kind B2 · utility

57Cited by
0References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 21, 2003
Grant dateJun 6, 2006
Priority date
Expiry dateSep 4, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/02192
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An article of manufacture comprises a substrate and a layer of N(x)Y(1−x)AlO3 on the substrate where x is a molar fraction greater than zero and less than one, and N is an element selected from La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. The article may be an electronic device further comprising an electrode electrically isolated from the substrate by the layer. In particular, the dielectric properties of the layer are such that the layer is especially although by no means exclusively useful for electrically isolating gate electrodes in field effect transistor devices. The layer may be formed on the substrate via molecular beam epitaxy.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.