Carbon nanotube sensor
US7057402B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2005 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | Jan 10, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Carbon nanotubes are formed on projections on a substrate. A metal, such as nickel is deposited on the substrate with optional platforms, and heated to form the projections. Carbon nanotubes are formed from the projections by heating in an ethylene, methane or CO atmosphere. A heat sensor is also formed proximate the carbon nanotubes. When exposed to IR radiation, the heat sensor detects changes in temperature representative of the IR radiation. In a gas sensor, a thermally isolated area, such as a pixel is formed on a substrate with an integrated heater. A pair of conductors each have a portion adjacent a portion of the other conductor with projections formed on the adjacent portions of the conductors. Multiple carbon nanotubes are formed between the conductors from one projection to another. IV characteristics of the nanotubes are measured between the conductors in the presence of a gas to be detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.