Frequency-scanning interferometer with non-specular reference surface
US7057742B2 · kind B2 · utility
10Cited by
21References
44Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 30, 2003 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | Dec 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A frequency-scanning interferometer is modified to include a diffuse reference surface. An illuminating system produces an expanding measuring beam, portions of which reflect from a test object surface and the diffuse reference surface on converging paths to an imaging system. Interference patterns between overlapping images of the object and reference surfaces are generated at a plurality of frequencies for measuring the object surface with respect to the reference surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.