Pressure sensor
US7059192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2004 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Jan 11, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15′) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.