Physical sensor
US7059203B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2004 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Nov 16, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical sensor having a pressure sensing layer having such property that electrical resistance is changed by application of a stress, and electrical insulating layers which are integrally formed on opposite two surfaces of the pressure sensing layer, respectively, wherein the pressure sensing layer has a matrix comprising glass, and an electrically conductive particle having electrical conductivity and dispersed in the matrix and preferably, the electrically conductive particle includes RuO2, and a thickness of the pressure sensing layer is 1 μm to 200 μm, and it is preferable that one pair of electrodes are disposed on the pressure sensing layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.