Gas friction pump
US7059828B2 · kind B2 · utility
3Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2004 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Jun 12, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.