Thermally tuned filter having a pre-stressed membrane
US7061659B2 · kind B2 · utility
4Cited by
0References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Mar 31, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/02446
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A thermally tuned filter having a pre-stressed membrane. The thermally tuned filter includes a handle layer, a dielectric layer positioned proximate to the handle layer, and a device layer positioned proximate to the handle layer. The device layer includes an optical device. A pre-stressed membrane is positioned proximate to the device layer; a tensile prestress of the pre-stressed membrane increases the natural frequency of the thermally tuned filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.