Light irradiating device
US7061679B1 · kind B1 · utility
10Cited by
17References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 1999 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Nov 3, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133788
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light irradiating device for a photo-alignment process comprises an optical system and a first polarizer polarizing the light from the optical system. The light from the first polarizer is obliquely irradiated at an angle with respect to a normal direction of a stage on which a substrate is placed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.