Patent · US Expired

Light irradiating device

US7061679B1 · kind B1 · utility

10Cited by
17References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 3, 1999
Grant dateJun 13, 2006
Priority date
Expiry dateNov 3, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F1/133788
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A light irradiating device for a photo-alignment process comprises an optical system and a first polarizer polarizing the light from the optical system. The light from the first polarizer is obliquely irradiated at an angle with respect to a normal direction of a stage on which a substrate is placed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.