Fabry-Perot interferometer
US7061681B2 · kind B2 · utility
14Cited by
3References
24Claims
0Family size
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Key dates
| Filing date | Mar 2, 2004 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Jan 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of tuning a resonant cavity of an FP (Fabry-Perot) interferometer in a DLD (diffractive light device) MEMS (microelectromechanical system) device, wherein the FP interferometer has a top plate and a bottom plate, and wherein the method comprises; using first and second electromechanical transducers to independently change a distance between the top and bottom plates of the FP interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.