Microring resonator and method for manufacturing
US7062118B2 · kind B2 · utility
5Cited by
2References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Sep 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/7789
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for making a plurality of waveguide resonator devices is disclosed herein. The method includes fixing a precursor resonator structure relative to a plurality of waveguides. The method also includes dividing the precursor resonator structure into a plurality of separate resonators after the precursor resonator structure has been fixed relative to the waveguides. The precursor resonator structure is divided at locations between the waveguides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.