Piezoelectric actuator, method for manufacturing the same, ink jet head, and ink jet recording apparatus
US7063407B2 · kind B2 · utility
1Cited by
3References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 8, 2003 |
| Grant date | Jun 20, 2006 |
| Priority date | — |
| Expiry date | Oct 31, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric actuator includes a vibration plate 26, a common electrode 27 formed on the vibration plate 26, a piezoelectric element 29 formed on the common electrode 27, a crystal control layer 28 formed on the piezoelectric element 29, a separate electrode 33 formed on the crystal control layer 28, and an electrode line 34 formed on the piezoelectric element 29. The crystal control layer 28 is formed in the displacement region. The crystalline structure of a piezoelectric element 29a in the displacement region is a perovskite structure, and that of a piezoelectric element 29b in the wiring region is a pyrochlore structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.