Quartz glass blank for an optical component and its utilization
US7064093B2 · kind B2 · utility
2Cited by
1References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2002 |
| Grant date | Jun 20, 2006 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2203/52
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.