Recessed electrode for electrostatically actuated structures
US7064637B2 · kind B2 · utility
54Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Jun 20, 2006 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electro-statically actuated switch having a reduced gap distance between electrodes for reducing actuation voltage is provided. The invention provides more reliable electro-statically actuated switches. The invention provides a micro-electro-mechanical system (MEMS) that includes a recessed, movable electrode. The invention provides electro-statically actuated switches that reduce the likelihood of stiction and beam deformation and that allows lower actuation voltage for electrostatically actuated structures such as switches and mirrors. A method for fabricating such a design is provided that allows lower actuation voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.