Apparatus and method for inspecting semiconductor device
US7065460B2 · kind B2 · utility
3Cited by
1References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 16, 2004 |
| Grant date | Jun 20, 2006 |
| Priority date | — |
| Expiry date | Sep 16, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67271
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An image of the shape of a semiconductor wafer is displayed on a display apparatus for displaying an inspection result of a semiconductor device, and a different color or pattern is displayed for each inspection result as display information indicating the inspection result of a semiconductor device in a region corresponding to the semiconductor device on the image of the semiconductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.