Docking-type system and method for transferring and treating substrate
US7065900B2 · kind B2 · utility
5Cited by
9References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 2004 |
| Grant date | Jun 27, 2006 |
| Priority date | — |
| Expiry date | May 25, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67196
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transferring/treating system includes a substrate stacking base, a substrate transferring member for receiving/transferring the substrate from/to the base, a substrate cleaning/drying device for cleaning and drying the substrate transferred from the substrate transferring member, and a substrate treating device for treating the substrate that is cleaned and dried by the substrate cleaning/drying device and transferred by the substrate transferring member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.