Method of manufacturing a fixed abrasive material
US7066801B2 · kind B2 · utility
40Cited by
39References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2003 |
| Grant date | Jun 27, 2006 |
| Priority date | — |
| Expiry date | Feb 2, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D13/147
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m3 to 1200 kg/m3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.