Method of making highly discriminating optical edge filters and resulting products
US7068430B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2004 |
| Grant date | Jun 27, 2006 |
| Priority date | — |
| Expiry date | May 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/285
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Highly discriminating optical edge filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical filters also have an average transmission above about 95%. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate. The methods include calculating theoretical transmission data for a layer of the filter and calculating an expected deposition duration for the layer. The methods also include measuring transmission through the layer during deposition for a period less than the expected deposition duration. When the measuring period elapses, a new deposition duration is calculated based upon the theoretical transmission data and the measured transmission data, thereby providing an accurate deposition duration for the layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.