Bistable microelectromechanical system based structures, systems and methods
US7070699B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2003 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jan 1, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0042
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.