Thermo-optical device
US7071492B2 · kind B2 · utility
2Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2003 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jun 30, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/066
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.