Position detection apparatus having a plurality of detection sections, and exposure apparatus
US7072023B2 · kind B2 · utility
0Cited by
13References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2002 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jun 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.