Ultrashort-pulse laser-working method and apparatus and structural bodies produced by using the same
US7072566B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2004 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jan 19, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/067
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser-working method is disclosed, which includes the steps of splitting a single pulse laser beam having a time width of not more than 500 picoseconds into plural pulse laser beams; subjecting said plural pulse laser beams to time delaying, and adjusting a working surface-irradiating shape, an intensity distribution and a working surface-irradiating position of each of the plural pulse laser beams; working a target object to be irradiated, while the respective working surface-irradiating shapes of said plural laser beams are partially or entirely spatially overlapped with each other or one another; and setting to a time interval of from a pulse width to 1 nanosecond a time period during which each of the pulse laser beams is irradiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.