Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method
US7072777B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1999 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Jun 15, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B5/01
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An exposure apparatus includes a motion control system, the motion control system including a structure, a plurality of actuators to apply forces to the structure, respectively, and a plurality of sensors to sense motion states of the structure, respectively. The apparatus includes a pseudo-random signal generator to generate a plurality of pseudo-random signals and to apply the plurality of pseudo-random signals to the plurality of actuators, the plurality of pseudo-random signals being equal in number to a number of degrees of freedom of the motion control system, a storage unit to store a first plurality of time-series data obtained by the plurality of sensors with a second plurality of time-series data corresponding to the plurality of pseudo-random signals, and a characteristic deriving unit to derive a characteristic of the motion control system based on the first and second plurality of time-series data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.