Pressure sensor with a radially tensioned metal diaphragm
US7073385B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 13, 2004 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Jun 4, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm disposed therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/° F. to 0.0000064 inch/inch/° F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/° F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.